Carrier head for chemical mechanical polishing a substrate

Details Carrier head for chemical mechanical polishing a substrate Carrier head for chemical mechanical polishing a substrate

1998-09-08

2000-12-12

Banks, Derris H.

Abrading

Abrading process

Glass or stone abrading

451285, 451286, 451282, 451288, 451289, 451388, 451398, B24B 100

Patent

active

061590797

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane with a lip portion to engage a substrate to form a seal for improved vacuum-chucking.

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