Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-07-31
2007-07-31
Vu, David (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C977S742000
Reexamination Certificate
active
11082000
ABSTRACT:
Some embodiments of the present invention include fabricating carbon nanotube bundles with controlled length, diameter, and metallic contacts.
REFERENCES:
patent: 6440763 (2002-08-01), Hsu
patent: 6921684 (2005-07-01), Dubin
U.S. Appl. No. 10/671,322, filed Sep. 24, 2003; Inventor: Valery Dubin.
U.S. Appl. No. 10/749,958, filed Dec. 30, 2003; Inventor: Valery Dubin.
Guglielmi David L.
Intel Corporation
Vu David
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