4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Hugo M. Visser

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Capping layer for EUV optical elements

Photocopying – Projection printing and copying cameras – Step and repeat
Reissue Patent

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Capping layer for EUV optical elements

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Isolation mounts for use with vacuum chambers and their...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Lithographic projection apparatus equipped with extreme...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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