Capacitor with pillar type storage node and method for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Details

C438S253000, C438S396000

Reexamination Certificate

active

07910428

ABSTRACT:
A capacitor includes a pillar-type storage node, a supporter filling an inner empty crevice of the storage node, a dielectric layer over the storage node, and a plate node over the dielectric layer.

REFERENCES:
patent: 11-017144 (1999-01-01), None
patent: 1020060018933 (2006-03-01), None
patent: 1020060069592 (2006-06-01), None

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