Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1994-12-27
1997-04-01
Oka, Christine K.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73493, 7351436, G01P 15125
Patent
active
056168446
ABSTRACT:
A capacitance acceleration sensor includes a movable electrode etched from a silicon plate which is clamped between two solid dielectric plate members of glass, silicon oxides, or oxygen oxides. Static electrodes are secured to surfaces of the dielectric members facing opposite the movable electrode, thereby providing easy manufacturing assessibility for leadout wires from these electrodes. In certain embodiments, the movable electrode is formed integrally with a monocrystalline silicon plate member which also contains an integrated circuit for generating an output acceleration signal in response to movement of the movable electrode when the assembly experiences acceleration forces.
REFERENCES:
patent: 5095750 (1992-03-01), Suzuki et al.
patent: 5417312 (1995-05-01), Tsuchitani
Hanzawa Keizi
Horie Junichi
Ichikawa Norio
Ogasawara Yuuji
Sasayama Takao
Hitachi , Ltd.
Oka Christine K.
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