4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Keizi Hanzawa

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Capacitance type acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Method of making a capacitance type acceleration sensor

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Profile ID: LFUS-PAI-P-771465

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