Cantilever probe and scanning type probe microscope utilizing th

Details Cantilever probe and scanning type probe microscope utilizing th Cantilever probe and scanning type probe microscope utilizing th

1997-12-09

1999-11-30

Noori, Max

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 734

Patent

active

059922257

ABSTRACT:
A cantilever probe for scanning a sample surface comprises a cantilever having a free end and a fixed end. A first support section is disposed at the free end and extends along a first plane. A probe is formed on the first support section for scanning movement relative to the sample surface. A second support section is disposed at the fixed end and extends along a second plane different from the first plane. A beam section interconnects the first support member and the second support member to one another and extends along a third plane different from the first and second planes.

REFERENCES:
patent: 5239863 (1993-08-01), Kado et al.
patent: 5336369 (1994-08-01), Kado et al.
patent: 5367165 (1994-11-01), Toda et al.
patent: 5400647 (1995-03-01), Elings
patent: 5418363 (1995-05-01), Elings et al.
Patent Abstracts of Japan, vol. 097, No. 008 Aug. 28, 1997.
Patent Abstracts of Japan, vol. 097, No. 003 Mar. 31, 1997.

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