Cantilever for scanning probe microscope

Details Cantilever for scanning probe microscope Cantilever for scanning probe microscope

2005-02-08

2005-02-08

Williams, Hezron (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C073S104000, C250S306000

Reexamination Certificate

active

06851301

ABSTRACT:
Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around the piezoactuator so as not to overlap with the piezoactuator, thereby minimizing inner couplings.

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Tortonese et al., “Atomic Force Microscopy Using A Piezoresistive Cantilever”, 1991, IEEE, International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, pp. 448-449.*
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