Cantilever and measuring apparatus using it

Details Cantilever and measuring apparatus using it Cantilever and measuring apparatus using it

1997-01-16

1999-07-27

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

374 6, 374124, 374164, 136228, G01B 700

Patent

active

059294388

ABSTRACT:
The present invention relates to a cantilever for separately observing a temperature profile of a surface of a sample and the topography thereof. The cantilever of the present invention comprises a support, a flexible plate one end of which is supported by the support, and a probe provided at the tip of the flexible plate, in which a thermocouple is provided in the probe.

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patent: 4747698 (1988-05-01), Wickramasinghe et al.
patent: 5047637 (1991-09-01), Toda
patent: 5239863 (1993-08-01), Kado et al.
patent: 5294790 (1994-03-01), Ohta et al.
patent: 5356218 (1994-10-01), Hopson et al.
patent: 5581083 (1996-12-01), Majumdar et al.
Meyer et al., "Novel Optical Approach to Atomic Force Microscopy", Appl. Phys. Lett. 53 (12) Sep. 19, 1988.
Williams et al., "Scanning Thermal Profiler", Appl. Phys. Lett. 49 (23) Dec. 8, 1986.

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