Broken die detect sensor

Details Broken die detect sensor Broken die detect sensor

2005-10-20

2009-02-10

Garber, Charles D. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

Reexamination Certificate

active

07488636

ABSTRACT:
A broken trim die tool detection sensor. The lands of the tie bar die connect with the leads of the unit to form switches. The states of these switches indicate broken die lands or other malfunctions.

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