Bottom antireflective coatings through refractive index modifica

Details Bottom antireflective coatings through refractive index modifica Bottom antireflective coatings through refractive index modifica

1997-03-06

2000-03-28

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Light scattering or refractive index image formation

430325, G03F 700

Patent

active

060429925

ABSTRACT:
The invention provides a process for the generation of an antireflective bottom layer with effective reduction of substrate reflectivity and swing curve effects in lithographic applications. It involves the use of a suitably selected monomeric and/or polymeric dye which brings the real part of the refractive index into a range which is optimal for the suppression of reflection-related effects. The refractive index change is effected via anomalous dispersion, i.e., by utilizing changes in the real part of the refractive index caused by the bottom layer's absorption.

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