Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate
2011-05-31
2011-05-31
Stafira, Michael P (Department: 2886)
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
Reexamination Certificate
active
07952713
ABSTRACT:
A bonding agent sticking inspection apparatus includes a photographing section, a movement section, and a control section. The photographing section photographs an image of a substrate. The image includes a sticking expected range indicating a range in which a bonding agent should be positioned. The control section controls the photographing section and the movement section, sets an inspection region having a width equal to the pitch between electrodes in an entire edge part in a direction in which the electrodes are arranged in a peripheral edge part of the sticking expected range in the image, detects a ratio of a nicked part of the bonding agent to the inspection region, and judges whether or not an abnormality is present in the bonding agent on the basis of a comparison between the ratio of the nicked part and a threshold set in advance.
REFERENCES:
patent: 6924875 (2005-08-01), Tomita
patent: 7800568 (2010-09-01), Kang et al.
patent: 7850800 (2010-12-01), Ueno et al.
patent: 2001-21333 (2001-01-01), None
Kabushiki Kaisha Toshiba
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Stafira Michael P
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