Black roll for optical measurement, thin film forming apparatus

Details Black roll for optical measurement, thin film forming apparatus Black roll for optical measurement, thin film forming apparatus

1999-08-06

2000-08-29

Kim, Robert H.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

427428, G01B 1106

Patent

active

061116483

ABSTRACT:
Disclosed is a black roll for optical measurement, which is used for a process of moving a film substrate around the black roll, and measuring optical characteristics of a thin film formed on the film substrate by using an optical monitor disposed in proximity to the film substrate. The black roll includes: a rotating cylinder colored in black, with the circumferential surface of which the film substrate is in close-contact; wherein the rotating cylinder has at least one groove formed in the circumferential surface of the rotating cylinder in such a manner as to extend in the circumferential direction, the groove being adapted to absorb light which is emitted from the optical monitor, passing through the film substrate, and is made incident on the black roll. The black roll is effective to eliminate almost all reflectance of light from the black roll in the case of measuring the reflectance of an optical thin film formed on a film substrate moved in such a manner as to be in close-contact with the black roll.

REFERENCES:
patent: 4969738 (1990-11-01), Mann
patent: 5212596 (1993-05-01), Andrus
patent: 5970613 (1999-10-01), Mori et al.
patent: 5989671 (1999-11-01), Nakayama et al.

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