Bistable aligner cartridge foot

Details Bistable aligner cartridge foot Bistable aligner cartridge foot

1984-05-01

1986-10-14

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378205, 378208, G21K 500, A61B 608

Patent

active

046176810

ABSTRACT:
The present invention is directed, in an X-ray lithographic system characterized by a plurality of work stations, a cartridge, apparatus for mounting a wafer and a mask on the cartridge, a system for moving the cartridge between stations, apparatus in each of the stations for moving the cartridge to a kinematic mount, said kinematic mounts in all of said stations being substantially identical, to the improvement comprising: a bistable foot operable in a first linear elevational mode and in a second angular compliance mode.

REFERENCES:
patent: 4525852 (1985-06-01), Rosenberg

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