BiCMOS semiconductor integrated circuit device having MOS transi

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257205, 257350, 257361, 257370, 257273, 257378, H01L 2976, H01L 2994, H01L 31062, H01L 31113

Patent

active

058863877

ABSTRACT:
Disclosed are a semiconductor integrated circuit device capable of including both a bipolar transistor and a MOS transistor while maintaining high performances of then both and a method of fabricating the device. On a p-type silicon substrate a plurality of n.sup.+ -type regions are formed below the buried collector region of a bipolar transistor and the n-type well region of a MOS transistor. A plurality of p-type regions are formed below the isolation region of the bipolar transistor and the p-type well region of the MOS transistor. An epitaxial layer is formed on the substrate including these n.sup.+ -type and p-type regions. This epitaxial layer forms element region layers having a bipolar transistor region and a MOS transistor region. The thickness of the layer of the bipolar transistor region is smaller than that of the layer of the MOS transistor region.

REFERENCES:
patent: 5331193 (1994-07-01), Mukogawa
patent: 5543653 (1996-08-01), Grubisich

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