Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-03-08
2008-07-15
Nguyen, Tu T (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
07400403
ABSTRACT:
An optical inspection device includes a light source for generating a probe beam. The probe beam is focused onto a sample to create a spread of angles of incidence. After reflecting from the sample, the light is imaged onto a two dimensional array of photodetectors. Prior to reaching the detector array, the beam is passed through a rotating compensator. A processor functions to evaluate the sample by analyzing the output of the photodetectors lying along one or more azimuthal angles and at different compensator positions.
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KLA-Tencor Corp.
Nguyen Tu T
Stallman & Pollock LLP
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