Coherent light generators – Particular beam control device
Reexamination Certificate
2006-07-18
2006-07-18
Vannucci, James (Department: 2828)
Coherent light generators
Particular beam control device
C372S102000
Reexamination Certificate
active
07079556
ABSTRACT:
A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.
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Algots John Martin
Buck Jesse D.
Das Palash P.
Erie Frederick G.
Fomenkov Igor V.
Cray William
Cymer Inc.
Vannucci James
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