Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2005-03-01
2005-03-01
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C073S105000
Reexamination Certificate
active
06861649
ABSTRACT:
A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or retract substantially simultaneously in response to a signal from a detector thus balancing the momentums of the first and second members and reducing the net momentum of the probe holder to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.
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Gurzo Paul M.
Lee John R.
Patterson Thuente Skaar & Christensen P.A.
Veeco Instruments Inc.
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