Back sputtering shield

Details Back sputtering shield Back sputtering shield

1997-01-08

2000-04-04

McDonald, Rodney G.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429812, 20419212, C23C 1434

Patent

active

060456701

ABSTRACT:
An improved target assembly for a deposition chamber wherein the backing plate which mounts a metal target has a groove for receiving a target shield. The target shield can be replaced during normal cleaning operations without replacement of the remainder of the target assembly. The target shield can be used with targets having tapered edges.

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patent: 5632873 (1997-05-01), Stevens et al.
patent: 5635036 (1997-06-01), Demaray et al.
Austrian Patent Search Report Dated Oct. 23, 1998.

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