4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Gregory N. Hamilton

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Back sputtering shield

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Semiconductor device with a copper barrier layer and formation t

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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