Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2009-01-21
2011-10-18
Punnoose, Roy (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
08040511
ABSTRACT:
Methods and apparatus for measuring an optical azimuth angle φOof a substrate relative to a plane of detection in scatterometry tools are disclosed. A grating target on a stage of a scatterometry tool may be illuminated and positions of the resulting diffraction orders may be observed. The optical azimuth angle may be determined from the positions of the diffraction orders. Alternatively, polarization-dependent signals of radiation scattered from a line grating may be measured for equal and opposite polarization angles +A and −A. A combination signal may be computed from the polarization-dependent signals obtained at +A and −A and a property of the combination signal may be calculated for several mechanical Azimuth angles φM. A relationship between the optical azimuth angle φOand the mechanical azimuth angle φMmay be determined from a behavior of the property as a function of mechanical azimuth angle φM.
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Krishnan Shankar
Lidsky David
Mieher Walter Dean
Wang Haiming
Zhou Haixing
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
Punnoose Roy
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