Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-02-24
2010-06-01
Wilkins, III, Harry D (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
Reexamination Certificate
active
07727364
ABSTRACT:
A method and apparatus for plating a metal onto a substrate. One embodiment of the invention provides an apparatus for electrochemically plating a substrate. The apparatus comprises a fluid basin configured to retain a plating solution therein, an anode assembly disposed in the fluid basin, a substrate support member configured to support the substrate and contact the substrate electrically, and an encased auxiliary electrode assembly disposed in the fluid basin. The encased auxiliary electrode assembly generally comprises an auxiliary electrode disposed in a protective tube.
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Behnke Joseph
Birang Manoocher
Hafezi Hooman
Rosenfeld Aron
Singh Saravjeet
Applied Materials Inc.
Patterson & Sheridan
Wilkins, III Harry D
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