Automatic probe replacement in a scanning probe microscope

Details Automatic probe replacement in a scanning probe microscope Automatic probe replacement in a scanning probe microscope

1998-04-02

2000-07-25

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, H01J 37067

Patent

active

060939303

ABSTRACT:
A scanning probe microscope having a probe attachment fixture, to which a probe assembly is removably attached during measurements, driven in an engagement direction, and a sample stage driven in scanning directions perpendicular to the engagement direction includes a buffer with a number of buffer stations within the sample stage. When the stage is driven so that one of the buffer stations is in alignment with the attachment fixture, and when the attachment fixture is driven in the engagement direction to be in proximity to the buffer station, the probe assembly is selectively transferred in either direction between the attachment fixture and the buffer station. In a preferred embodiment, probe assemblies are transferred on transfer pallets, and a stationary magazine is provided for storing these pallets, which are transferred in either direction between the magazine and the buffer.

REFERENCES:
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patent: 4649623 (1987-03-01), Schneider et al.
patent: 4688307 (1987-08-01), Schneider et al.
patent: 4992660 (1991-02-01), Kobayashi
patent: 5598104 (1997-01-01), Boyette, Jr.
patent: 5672816 (1997-09-01), Park et al.

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