4. Radiant energy
  5. Inspection of solids or liquids by charged particles

International Business Machnines Corporation

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Automatic probe replacement in a scanning probe microscope

Radiant energy – Inspection of solids or liquids by charged particles
Patent

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Suppression of localized metal precipitate formation and...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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