Optics: measuring and testing – By configuration comparison – With object being compared and light beam moved relative to...
Patent
1979-04-03
1982-08-31
Rosenberger, R. A.
Optics: measuring and testing
By configuration comparison
With object being compared and light beam moved relative to...
356390, G01B 1114
Patent
active
043470017
ABSTRACT:
Optical inspection apparatus for detecting differences between two dies in a photomask and including a carriage for supporting the objects to be inspected and for simultaneously moving such objects along an inspection path, an illuminator for illuminating corresponding portions of the objects as they are moved along the inspection path, electro-optical detectors for individually inspecting the illuminated portions and for developing first and second electrical signals respectively corresponding thereto, electronic memories for storing the first and second electrical signals, a computer for scanning the memories and for electronically aligning a readout of the first signal relative to a readout of the second signal, and a comparator for comparing the electronically aligned signals and for indicating any differences therebetween.
REFERENCES:
patent: 3627918 (1971-12-01), Redpath
patent: 3672778 (1972-06-01), Kern
patent: 3944369 (1976-03-01), Cuthbert et al.
patent: 4006296 (1977-02-01), Peterson
patent: 4052603 (1977-10-01), Karlson
patent: 4247203 (1981-01-01), Levy et al.
Levy Kenneth
Sandland Paul
Hamrick Claude A. S.
KLA Instruments Corporation
Rosenberger R. A.
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