Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent
1989-10-31
1992-07-21
Turner, Samuel
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
356386, 356446, G01B 1130
Patent
active
051317559
ABSTRACT:
In each configuration, at least one TDI sensor is used to image substrate portions of interest, with those portions illuminated with substantially uniform illumination. In one configuration, a substrate is compared to prestored expected characteristic features. In a second configuration, first and second patterns in a region of the surface of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other. This is accomplished by illuminating the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. Each time the comparison is performed, it is noted whether or not there has been agreement between the two patterns and which two patterns where compared. This inspection technique is useful for doing die-to-die inspections. A variation of the second configuration uses two TDI sensors to simultaneously image the first and second patterns, thus eliminating the need for temporary memory. In this configuration, the two patterns are simultaneously imaged and compared, then additional patterns are compared sequentially, in the same manner with the results of the comparisons and the pattern locations stored to determine which patterns are bad when the inspection of all patterns is completed.
REFERENCES:
patent: 3909602 (1975-09-01), Micka
patent: 3963354 (1976-06-01), Feldman et al.
patent: 4680627 (1987-07-01), Sase et al.
patent: 4799175 (1989-01-01), Sano et al.
patent: 4877326 (1989-10-01), Chadwick et al.
Bell William
Chadwick Curt H.
Fein Michael E.
Greene John D.
Harvey David J.
Jones Allston L.
Turner Samuel
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