Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent
1989-10-31
1992-02-04
Turner, Samuel
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
356386, 356446, G01B 1130
Patent
active
050855174
ABSTRACT:
In each configuration, at least one TDI sensor is used to image the portions of interest of the substrate that are substantially uniformly or critically illuminated. In one configuration, the substrate is compared to the expected characteristic features prestored in memory. In a second configuration, a first and second pattern in a region of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other. This is accomplished by illuminating the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. With each comparison whether there has been agreement between the two patterns is noted. After all of the patterns are sequentially compared, the bad ones are identified by identifying those that did not compare with other patterns in the test process. This inspection technique is useful for doing die-to-die inspections, as well as repeating patern inspections within the same die. A variation of the second configuration uses two TDI sensors to simultaneously image the first and second patterns eliminating the need for the temporary memory.
REFERENCES:
patent: 3909602 (1975-05-01), Micka
patent: 3963354 (1976-06-01), Feldman et al.
patent: 4680627 (1987-07-01), Sase et al.
patent: 4799175 (1989-01-01), Sano et al.
patent: 4877326 (1989-10-01), Chadwick et al.
Bell William
Chadwick Curt H.
Fein Michael E.
Greene John D.
Harney David J.
Jones Allston L.
Turner Samuel
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