Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1997-09-02
1999-01-05
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
324252, G01B 724, G01B 734, G01R 3302
Patent
active
058566171
ABSTRACT:
An atomic force microscope (AFM) uses a spin valve magnetoresistive strain gauge formed on the AFM cantilever to detect deflection of the cantilever. The spin valve strain gauge operates in the absence of an applied magnetic field. The spin valve strain gauge is formed on the AFM cantilever as a plurality of films, one of which is a free ferromagnetic layer that has nonzero magnetostriction and whose magnetic moment is free to rotate in the presence of an applied magnetic field. In the presence of an applied stress to the free ferromagnetic layer due to deflection of the cantilever, an angular displacement of the magnetic moment of the free ferromagnetic layer occurs, which results in a change in the electrical resistance of the spin valve strain gauge. Electrical resistance detection circuitry coupled to the spin valve strain gauge is used to determine cantilever deflection.
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Gurney Bruce Alvin
Mamin Harry Jonathon
Rugar Daniel
Speriosu Virgil Simon
Berthold Thomas R.
International Business Machines - Corporation
Larkin Daniel S.
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