Atomic force microscope system with cantilever having unbiased s

Measuring and testing – Surface and cutting edge testing – Roughness

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324252, G01B 724, G01B 734, G01R 3302

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active

058566171

ABSTRACT:
An atomic force microscope (AFM) uses a spin valve magnetoresistive strain gauge formed on the AFM cantilever to detect deflection of the cantilever. The spin valve strain gauge operates in the absence of an applied magnetic field. The spin valve strain gauge is formed on the AFM cantilever as a plurality of films, one of which is a free ferromagnetic layer that has nonzero magnetostriction and whose magnetic moment is free to rotate in the presence of an applied magnetic field. In the presence of an applied stress to the free ferromagnetic layer due to deflection of the cantilever, an angular displacement of the magnetic moment of the free ferromagnetic layer occurs, which results in a change in the electrical resistance of the spin valve strain gauge. Electrical resistance detection circuitry coupled to the spin valve strain gauge is used to determine cantilever deflection.

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S. F. Cheng et al., "Magnetostrictive Effects in Cu/Co/Cu/Fe Spin Valve Structures", Journal of Magnetism and Magnetic Materials, vol. 148, 1995, pp. 344-345.
R. C. O'Handley et al., "New Spin-Valve Magnetic Field Sensors Combined with Strain Sensing and Strain Compensation", IEEE Transactions on Magnetics, vol. 31, No. 4, Jul. 1995, pp. 2450-2454.

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