Arrangement for holding a particle beam apparatus

Details Arrangement for holding a particle beam apparatus Arrangement for holding a particle beam apparatus

2005-11-29

2005-11-29

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S309000, C248S638000

Reexamination Certificate

active

06969854

ABSTRACT:
An arrangement for holding a particle beam apparatus such as a transmission electron microscope. The arrangement is sufficient for receiving a good resolution in the area of 1 Å or less, said arrangement still being under more or less no influence of the environment, in particular, building vibrations. In one embodiment, the arrangement comprises a base structure comprising a plurality of hollow bodies, at least one of said hollow bodies having a first length extension in a first direction, a second length extension in a second direction and a third length extension in a third direction, said first length extension being larger than said second and third length extensions, and wherein a cross section of said at least one of said hollow bodies perpendicular to said first direction is substantially triangular. Due to the hollow body shape, a very stiff structure is provided with a very good eigenfrequency.

REFERENCES:
patent: 4044256 (1977-08-01), Krisch et al.
patent: 6646719 (2003-11-01), Lee et al.
Erik Essers, Gerd Benner, Alexander Orchowski, Roland Kappel and Michael Trunz, Distributed on CD “Microsoft and Microanalysis 2002 (8) Suppl. 2, 2002, 484” at the Conference “Microscopy and Microanalysis 2002,” Aug. 5-8, 2002, in Quebec, Canada.
Erik Essers, Gerd Benner, Alexander Orchowski, Roland Kappel and Michael Trunz, Poster from Conference “Microscopy and Microanalysis 2002,” Aug. 5-8, 2002, in Quebec, Canada.
A Suspension System for a Very High Resolution Electron Microscope, by A.E. Timbs and P.W. Turner, Engineering Department at Cambridge University in England.
Electronic, Mechanical and Electron-Optical Engineering Design Features of the Cambridge University 600 kV High Resolution Electron Microscope by W.C. Nixon, H. Ahmed, C.J.D. Catto, J.R.A. Cleaver, K.C.A. Smith, A.E. Timbs and P.W. Turner, Engineering Department at Cambridge University in England.

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