Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
Examiner
active
No affiliations
Apparatus for etching or depositing a desired profile onto a...
Arrangement comprising a support body and a substrate holder...
Downward mechanism for support pins
Etching system using a deionized water adding device
Multiple zone carrier head with flexible membrane
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Profile ID: LFUS-PAI-P-2471602