Architecture of a reflective spatial light modulator

Details Architecture of a reflective spatial light modulator Architecture of a reflective spatial light modulator

2006-08-15

2006-08-15

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S295000, C359S298000, C345S055000

Reexamination Certificate

active

07092140

ABSTRACT:
A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.

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