Apparatuses and methods for cleaning a substrate

Details Apparatuses and methods for cleaning a substrate Apparatuses and methods for cleaning a substrate

2004-03-31

2008-10-28

Guidotti, Laura C (Department: 3723)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C134S902000, C015S088300, C015S102000, C015S302000

Reexamination Certificate

active

07441299

ABSTRACT:
An apparatus for use in processing a substrate includes a brush enclosure extending over a length. The brush enclosure is configured to be disposed over a surface of the substrate and has an open region that is configured to be disposed in proximity to the substrate. The open region extends over the length of the brush enclosure and enables foam from within the brush enclosure to contact the surface of the substrate. A substrate cleaning system and method for cleaning a substrate are also described.

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