4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Alan Schoepp

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Apparatuses and methods for cleaning a substrate

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
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Apparatuses and methods for cleaning a substrate

Brushing – scrubbing – and general cleaning – Machines – Brushing
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High temperature electrostatic chuck

Coating apparatus – Gas or vapor deposition – Work support
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High temperature electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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High temperature electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Profile ID: LFUS-PAI-P-2371072

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