Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2005-03-30
2010-12-21
Dinh, Paul (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000, C716S030000
Reexamination Certificate
active
07856606
ABSTRACT:
A method for minimizing rippling of features when imaged on a surface of a substrate using a mask. The method includes the steps of determining a deviation between a first representation of the design and a second representation of an image of the design at each of a plurality of evaluation points for each section of a plurality of sections of the design; determining an amount of modification of the design at each section based on an evaluation of the plurality of evaluation points; and modifying the design at each section by the amount determined in the previous step.
REFERENCES:
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 5991006 (1999-11-01), Tsudaka
patent: 6014456 (2000-01-01), Tsudaka
patent: 6046792 (2000-04-01), Van der Werf et al.
patent: 6154563 (2000-11-01), Tsudaka
patent: 6248485 (2001-06-01), Cuthbert
patent: 6249597 (2001-06-01), Tsudaka
patent: 6625801 (2003-09-01), Pierrat et al.
patent: 6665856 (2003-12-01), Pierrat et al.
patent: 6907596 (2005-06-01), Kobayashi et al.
patent: 7384710 (2008-06-01), Ogawa et al.
patent: 2002/0100004 (2002-07-01), Pierrat et al.
patent: 2003/0110465 (2003-06-01), Zhang
patent: 2003/0170551 (2003-09-01), Futatsuya
patent: 2005/0055658 (2005-03-01), Mukherjee et al.
patent: 2005/0153217 (2005-07-01), Izuha et al.
patent: 2007/0006118 (2007-01-01), Pierrat et al.
patent: 11-121361 (1999-04-01), None
patent: 11121361 (1999-04-01), None
patent: 2000100692 (2000-04-01), None
patent: 2001183804 (2001-07-01), None
patent: 2002250999 (2002-09-01), None
patent: 2003-59809 (2003-02-01), None
patent: 2003059809 (2003-02-01), None
patent: 2003287871 (2003-10-01), None
patent: 2005215587 (2005-08-01), None
patent: 2009034095 (2009-02-01), None
patent: 1998-033229 (1998-07-01), None
patent: 98/40791 (1998-09-01), None
patent: 03/067331 (2003-08-01), None
European Search Report issued in corresponding European Patent Application No. 05252042.6, dated Jan. 25, 2007.
Korean Office Action issued in Korean Patent Application No. KR 10-2005-0027091, mailed Jan. 14, 2008.
Eurlings Markus Franciscus Antonius
Hollerbach Uwe
Laidig Thomas
Mulder Melchior
ASML MaskTools B.V.
Dinh Paul
Pillsbury Winthrop Shaw & Pittman LLP
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