4. Computer-aided design and analysis of circuits and semiconductor
  5. Nanotechnology related integrated circuit design

ASML MaskTools B.V.

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Apparatus, method and program product for suppressing...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Method and apparatus for performing dark field double dipole...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method, program product and apparatus for obtaining...

Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system
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