Apparatus for real-time, in situ measurement of temperature and

Details Apparatus for real-time, in situ measurement of temperature and Apparatus for real-time, in situ measurement of temperature and

1996-08-27

1998-07-07

Bennett, G. Bradley

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

374131, 374137, G01K 1120

Patent

active

057758085

ABSTRACT:
Apparatus having a plurality of temperature sensors (probes) positioned at a number of locations upon a platform such as a placebo or dummy wafer and a method of fabricating and using the apparatus. The temperature sensors are photoemissive temperature sensors. To fabricate each of the photoemissive sensors, a thermally conductive epoxy is placed in a mound at each sensor location upon the platform. Upon one side of this mound, a coating of phosphorous material is applied. One end of a fiber optic cable abuts the phosphor material, and a an encapsulation layer such as a polyimide tape is positioned atop the conductive epoxy and the fiber optic cable such that the fiber optic cable is maintained in a stationary position relative to the phosphor material to obtain a local temperature of the wafer surface.

REFERENCES:
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patent: 5225024 (1993-07-01), Hanley et al.
patent: 5299869 (1994-04-01), Wissinger
patent: 5556204 (1996-09-01), Tamura et al.

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