4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

Shaoher X. Pan

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Addressing circuit and method for bi-directional...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Apparatus and method for monitoring processing of a substrate

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Apparatus for measuring plasma characteristics within a semicond

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Apparatus for monitoring processing of a substrate

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Apparatus for real-time, in situ measurement of temperature and

Thermal measuring and testing – Temperature measurement – Nonelectrical – nonmagnetic – or nonmechanical temperature...
Patent

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Profile ID: LFUS-PAI-P-469483

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