Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2005-04-12
2005-04-12
Eley, Timothy V. (Department: 3724)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S008000, C451S288000
Reexamination Certificate
active
06878036
ABSTRACT:
A sensor for monitoring a conductive film in a substrate during chemical mechanical polishing generates an alternating magnetic field that impinges a substrate and induces eddy currents. The sensor can have a core, a first coil wound around a first portion of the core and a second coil wound around a second portion of the core. The sensor can be positioned on a side of the polishing surface opposite the substrate. The sensor can detect a phase difference between a drive signal and a measured signal.
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Birang Manoocher
Hanawa Hiroji
Johansson Nils
Swedek Bogusla W
Applied Materials Inc.
Eley Timothy V.
Fish & Richardson
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