Apparatus for measuring the thickness of thin layers

Details Apparatus for measuring the thickness of thin layers Apparatus for measuring the thickness of thin layers

1979-08-24

1981-10-06

Smith, Aflred E.

Radiant energy

Inspection of solids or liquids by charged particles

Including a radioactive source

250359, G01N 2300

Patent

active

042937671

ABSTRACT:
The apparatus measures the thickness of thin layers on strips and wires which are moved relative to the apparatus. The apparatus is stationary and includes one or more beta emitters directed towards the layer and spatially arranges relative to the longitudinal axis of a beta radiation detector or counting tube which is arranged to the rear of the beta emitter for counting the backscattered beta radiation, and a guide for the strip or wire at a specified distance from the beta emitter. The ratio of the characteristic cross-sectional dimension (D) of the window of the beta radiation detector to the intersecting surface diameter (d) of the intersecting surface layer/intensity distribution curve of the beta emitter, being expressed as D/d=15 . . . 2; with the distance between the layer and the beta radiation emitter being in the plateau region of the curve of the counting rate/distance characteristic obtained by the above feature.

REFERENCES:
patent: 3493755 (1970-02-01), Hannula
patent: 3714436 (1973-01-01), Fischer
patent: 4115690 (1978-09-01), Weinstock et al.

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