Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent
1992-11-16
1993-12-07
Evans, F. L.
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
356237, G01B 1100, G01N 2188
Patent
active
052687430
ABSTRACT:
A single-axle stage is moved in a direction from B to A while measuring the distance between a laser array displacement meter and an outer lead of a tape carrier package, and after completion of measurement in such a direction, a rotary stage is turned clockwise by 90 degrees and the single-axle stage is similarly moved in a direction from C to B, to collect data on the distance between the laser array displacement meter and each of outer leads which are enough to recognize the shape of each outer lead and to store them in an internal memory disposed in a CPU. The flatness of each outer lead is determined by calculating based upon these data a regression line for each outer lead and the maximum scatter amount of data in regard to the regression line by a single lead flatness operating unit. The flatness of each side of the tape carrier package is determined by performing a similar operation from similar data on one side by a one-side flatness operating unit. The flatness of each of the outer leads and the flatness of each side of the tape carrier package are measured at higher accuracy than that in the prior art microscopic observation and shortening of examination time is achieved.
REFERENCES:
patent: 5114229 (1992-05-01), Hideshima
patent: 5162866 (1992-11-01), Tomiya et al.
patent: 5208463 (1993-05-01), Honma et al.
Patent Abstracts of Japan, vol. 15, No. 349, publication date Sep. 4, 1991, Abstract of 03-134507.
Patent Abstracts of Japan, vol. 11, No. 376, publication date Dec. 8, 1987, Abstract of 62-143448.
Evans F. L.
NEC Corporation
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