Apparatus for manufacturing semiconductor substrates

Details Apparatus for manufacturing semiconductor substrates Apparatus for manufacturing semiconductor substrates

2006-08-24

2009-02-03

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S398000, C250S400000, C250S440110, C250S442110

Reexamination Certificate

active

07485874

ABSTRACT:
This apparatus for manufacturing semiconductor substrates has support disks and holding units holding semiconductor substrates on the support disks. The holding unit has a stopper which is formed of a conductive material and holds the brim of the semiconductor substrate, a stopper holder which supports the stopper at the outer circumferential portion thereof, a retaining member which retains the stopper to the support disk, and a heating unit which heats the stopper.

REFERENCES:
patent: 3845312 (1974-10-01), Allison, Jr.
patent: 4873447 (1989-10-01), Imahashi
patent: 4883968 (1989-11-01), Hipple et al.
patent: 5004924 (1991-04-01), Imahashi
patent: 5134301 (1992-07-01), Kamata et al.
patent: 5244820 (1993-09-01), Kamata et al.
patent: 5525807 (1996-06-01), Hirokawa et al.
patent: 5608223 (1997-03-01), Hirokawa et al.
patent: 5932883 (1999-08-01), Hashimoto et al.
patent: 6570171 (2003-05-01), Tomita et al.
patent: 6614190 (2003-09-01), Tomita et al.
patent: 6667485 (2003-12-01), Tomita et al.
patent: 6667486 (2003-12-01), Ohta et al.
patent: 7217934 (2007-05-01), Mori
patent: 7314785 (2008-01-01), Yamazaki et al.
patent: 2005/0087769 (2005-04-01), Yamazaki et al.
patent: 2005/0218336 (2005-10-01), Mori
patent: 2007/0114458 (2007-05-01), Nakamura et al.
patent: 2008/0105877 (2008-05-01), Yamazaki et al.
Japanese Unexamined Patent Application, First Publication No. 2002-231176 corresponding to U.S. Patent No. 6,614,190.

Affiliated with

Also associated with

Rating

Apparatus for manufacturing semiconductor substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for manufacturing semiconductor substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for manufacturing semiconductor substrates will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4128688