4. Electric heating
  5. Metal heating
  6. By arc

Kazuo Mera

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Apparatus for manufacturing semiconductor substrates

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Ion implantation system and ion implantation method

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implanter

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Profile ID: LFUS-PAI-P-358511

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