Apparatus for ion-implantation in elements, especially discs of

Details Apparatus for ion-implantation in elements, especially discs of Apparatus for ion-implantation in elements, especially discs of

1976-07-01

1977-08-23

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250492A, G01N 2100, G01N 2300, G21G 500

Patent

active

040442667

ABSTRACT:
An apparatus for ion-implantation in elements, especially discs of semi-conducting material, in which a vacuum container has an end wall which has lock means by which the elements may be passed from the outside of the container to a position in the end wall, where one of its surfaces is exposed to the vacuum space in the container and treated by ions. The lock means includes a rotatable slide valve mounted between two parallel walls in one of which an aperture to the outer atmosphere is provided and in the second of which an aperture to the inner space of the container is provided. A number of apertures, corresponding to the said apertures in the walls, are provided in the slide value. The elements are positioned in one of the apertures in the slide valve, and by its rotation, conveyed to the wall aperture opening into the vacuum space. In the two parallel walls, two sets of cavities are provided, one encircling the other, each of which is connected to a separate vacuum source. When an element is conveyed from the wall aperture connected with the atmosphere to the wall aperture connected with the vacuum space, it passes the two systems of cavities, so that air in all value apertures of the lock means will be successively evacuated to the vacuum sources.

REFERENCES:
patent: 3342992 (1967-09-01), Schmidt et al.
patent: 3356844 (1967-12-01), Houbart
patent: 3400265 (1968-09-01), Houbart

Affiliated with

Also associated with

Rating

Apparatus for ion-implantation in elements, especially discs of does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for ion-implantation in elements, especially discs of , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for ion-implantation in elements, especially discs of will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2317677