Apparatus for handling semiconductor wafers

Details Apparatus for handling semiconductor wafers Apparatus for handling semiconductor wafers

1988-05-18

1990-03-13

Werner, Frank E.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

414416, 414627, 414752, 414757, 4147446, B65H 500

Patent

active

049079310

ABSTRACT:
A semiconductor wafer handling apparatus for automated movement of semiconductor wafers between wafer cassette trays and wafer test systems is provided. The apparatus includes a platform for carrying at least one semiconductor wafer cassette tray, a wafer alignment device carried by the platform for aligning a semiconductor wafer in a predetermined test position and a wafer transfer device associated with the platform and the wafer alignment device for transferring the wafer between the cassette tray, the alignment device and the test system. The wafer transfer device is operational in the same plane relative to the platform and capable of extending, retracting and rotating in the plane. In includes a shuttle arm assembly mounted for translational and rotational movement so that it may be selectively aligned with the cassette tray, the alignment device and the test system and further includes a device for controlling the translational and rotational movement of the shuttle arm assembly for selectively extending, retracting the rotating the shuttle arm assembly relative to each of the cassette tray, the alignment device and the test system so that in response to signals from the control device, the shuttle arm assembly can be selectively actuated to translate to a cassette tray position and secure and remove a semiconductor wafer from the cassette tray, translate to a wafer alignment position and insert, release, secure and remove the wafer from the alignment device, and translate and rotate to a wafer test position and place the wafer on, release, secure, and lift the wafer off the test system.

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patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4695215 (1987-09-01), Jacoby et al.
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4752898 (1988-06-01), Koenig

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