Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate
2009-03-13
2011-12-27
Alejandro, Luz L. (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With radio frequency antenna or inductive coil gas...
C118S7230IR, C118S7230AN, C156S345480
Reexamination Certificate
active
08083892
ABSTRACT:
A method for manufacturing a semiconductor device may include: forming a main magnetic field having an axis, and forming a subsidiary magnetic field substantially parallel to the axis; applying an alternating current along a path between the main and the subsidiary magnetic fields; allowing a gas to flow along a flow path along the path of the current so that a gas plasma is generated from the gas; providing the gas plasma into a chamber separated from a position where the gas plasma is generated; and performing a process for manufacturing a semiconductor device by employing the gas plasma.
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Bae Do-In
Choi Dae-Kyu
Hwang Wan-Goo
Kim Jin-Man
Min Young-Min
Alejandro Luz L.
Harness & Dickey & Pierce P.L.C.
New Power Plasma Co., Ltd.
Samsung Electronics Co,. Ltd.
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