Coating apparatus – Work holders – or handling devices
Reexamination Certificate
2005-01-26
2010-11-09
Edwards, Laura (Department: 1713)
Coating apparatus
Work holders, or handling devices
C118S052000, C118S319000, C118S320000, C118S420000, C118S429000
Reexamination Certificate
active
07827930
ABSTRACT:
An electroless deposition system is provided. The system includes a processing mainframe, at least one substrate cleaning station positioned on the mainframe, and an electroless deposition station positioned on the mainframe. The electroless deposition station includes an environmentally controlled processing enclosure, a first processing station configured to clean and activate a surface of a substrate, a second processing station configured to electrolessly deposit a layer onto the surface of the substrate, and a substrate transfer shuttle positioned to transfer substrates between the first and second processing stations. The system also includes a substrate transfer robot positioned on the mainframe and configured to access an interior of the processing enclosure. The system also includes a substrate a fluid delivery system that is configured to deliver a processing fluid by use of a spraying process to a substrate mounted in the processing enclosure.
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Cheboli Ramakrishna
Ellwanger Russell
Lubomirsky Dmitry
Pancham Ian A.
Shanmugasundram Arulkumar
Applied Materials Inc.
Edwards Laura
Patterson & Sheridan LLP
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