Apparatus and methods for conditioning a polishing pad

Details Apparatus and methods for conditioning a polishing pad Apparatus and methods for conditioning a polishing pad

2011-06-21

2011-06-21

Rachuba, Maurina (Department: 3727)

Abrading

Abrading process

With tool treating or forming

C451S443000

Reexamination Certificate

active

07963826

ABSTRACT:
Apparatus and methods for conditioning a polishing pad include an arm adapted to support a conditioning disk; a drive mechanism coupled to the arm; and a flexible coupling between the drive mechanism and the conditioning disk adapted to allow the conditioning disk to tilt while transmitting rotary motion from the drive mechanism to the conditioning disk. Numerous other aspects are disclosed.

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