Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-09-26
2006-09-26
Tang, Minh N. (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S755090, C324S758010
Reexamination Certificate
active
07112983
ABSTRACT:
An apparatus for facilitating single die backside probing of semiconductor devices includes a chip holder configured for receiving a single integrated circuit die attached thereto, the chip holder maintained in flexible engagement in an X-Y orientation with respect to a lift plate. A lift ring is coupled to the lift plate, the lift ring configured to facilitate adjustment of the lift plate and the chip holder in a Z-direction.
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McGinnis Patrick J.
Miles Darrell L.
Oldrey Richard W.
Sylvestri John D.
Villalobos Manuel J.
Cantor & Colburn LLP
International Business Machines - Corporation
Jaklitsch Lisa U.
Tang Minh N.
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