Apparatus and method for positioning semiconductor substrate

Details Apparatus and method for positioning semiconductor substrate Apparatus and method for positioning semiconductor substrate

2004-02-09

2008-12-02

Keenan, James (Department: 3652)

Material or article handling

Article reorienting device

Article reoriented while fully supported by stationary...

C414S936000, C414S816000

Reexamination Certificate

active

07458762

ABSTRACT:
The disclosure is a baking apparatus including a susceptor, lift pins, and guiding blocks positioned at the edge of the susceptor to lead a wafer to be exactly positioned on the susceptor. The guiding blocks are linearly movable within a range of a semidiameter of a plate. A wafer is partially mounted on a wafer guide, being inclined against the susceptor, and thereby may heats uniformly.

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patent: 2003-0012479 (2003-02-01), None

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