4. Geometrical instruments
  5. Gauge
  6. Collocating

Sun-Kyu Kim

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Apparatus and method for positioning semiconductor substrate

Material or article handling – Article reorienting device – Article reoriented while fully supported by stationary...
Reexamination Certificate

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Semiconductor IC incorporating a co-debugging function and...

Error detection/correction and fault detection/recovery – Data processing system error or fault handling – Reliability and availability
Reexamination Certificate

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System and method for detecting position of semiconductor wafer

Geometrical instruments – Gauge – Collocating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2633369

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